Saturday, March 25, 2017

Leti Installs k-Space MOS ThermalScan

k-Space, a manufacturer of metrology tools for the semiconductor industry, announced that Leti, an institute of CEA and leading innovator in nanotechnology research and technology, has installed a kSA MOS ThermalScan system for the measurement of film stress and wafer bow.

The custom kSA MOS ThermalScan is capable of measuring wafers up to 300mm in diameter from 20°C to 1000°C. The system is configured to use either a full 300 mm quartz viewport for full wafer mapping at temperatures up to 600°C, or 300mm x 20mm linear slit viewport for linear scans up to 1000°C.