Thin-film metrology tools manufacturer k-Space offers a number of tools that can be used to measure surface roughness:
kSA 400 determines surface quality by analyzing the RHEED streak profile.
kSA BandiT measures via above-gap scatter signal in MBE, PLD, ALD, sputtering and e-beam evaporation deposition.
kSA BandiT PV measures via above-gap scatter signal in thin-film in-line production.
kSA ICE measures surface roughness via analysis of above gap scatter signal in MOCVD reactors.
Take a Tour of k-Space's Product Development Facilities: