Saturday, March 25, 2017

Leti Installs k-Space MOS ThermalScan

k-Space, a manufacturer of metrology tools for the semiconductor industry, announced that Leti, an institute of CEA and leading innovator in nanotechnology research and technology, has installed a kSA MOS ThermalScan system for the measurement of film stress and wafer bow.

The custom kSA MOS ThermalScan is capable of measuring wafers up to 300mm in diameter from 20°C to 1000°C. The system is configured to use either a full 300 mm quartz viewport for full wafer mapping at temperatures up to 600°C, or 300mm x 20mm linear slit viewport for linear scans up to 1000°C.

Monday, December 19, 2016

Tools to Measure Surface Roughness

Thin-film metrology tools manufacturer k-Space offers a number of tools that can be used to measure surface roughness:

kSA 400 determines surface quality by analyzing the RHEED streak profile.

kSA BandiT measures via above-gap scatter signal in MBE, PLD, ALD, sputtering and e-beam evaporation deposition.

kSA BandiT PV measures via above-gap scatter signal in thin-film in-line production.

kSA ICE measures surface roughness via analysis of above gap scatter signal in MOCVD reactors.

Take a Tour of k-Space's Product Development Facilities: